Regulator stability in a pressure regulated storage vessel

ABSTRACT

A pressure regulator device for use within a pressure-regulated fluid storage and dispensing vessel primarily in low flow, low delivery pressure applications. Regulator stiction challenges have been solved with an improved poppet assembly using different poppet element configurations as well as an improved bellows structure in the pressure-sensing assembly that provides more flexibility during contraction and expansion of the diaphragm elements.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application claims the benefit under 35 USC 119 of U.S.Provisional Application No. 62/666,755 filed on May 4, 2018, thedisclosure of which is hereby incorporated by reference herein in itsentirety for all purposes. Additionally, the present application isrelated to U.S. Patent Publication No. 2015/0247605 (Ser. No.14/430,105) filed on Mar. 20, 2015 which is hereby also incorporatedherein by reference in its entirety.

TECHNICAL FIELD

The present disclosure relates to pressure management ofpressure-regulated fluid storage and dispensing vessels that can besusceptible to severe pressure-fluctuations behavior upon initiation offluid dispensing operation. The pressure management arrangements andmethods of the present disclosure are also contemplated for use inresolving continual periodic pressure oscillations, also known as“spiking” behavior, e.g., fluid pressure excursions of a recurrentepisodic character.

BACKGROUND

In the field of semiconductor manufacturing, various fluid supplypackages are used to provide process fluids for use in the manufacturingoperation and in ancillary fluid-utilizing processes such as processvessel cleaning. As a result of safety and process efficiencyconsiderations, fluid supply packages have been developed that utilizefluid storage and dispensing vessels in which pressure-regulatingdevices are provided in the interior volume of the vessel or the vesselvalve head. Examples of such fluid supply packages incorporatingpressure-regulated vessels include the fluid supply packagescommercially available from Entegris/ATMI, Inc. (Danbury, Conn., USA)under the trademark VAC®, the pressure-regulated vessel fluid supplypackages commercially available from Praxair, Inc. under the trademarkUPTIME.

In some instances, pressure-regulated vessels coupled to flow circuitryexhibit sudden pressure fluctuations upon initiation of fluid dispensingoperation. This anomalous behavior is most frequently experienced as apressure spike that is sensed by pressure sensing components in the flowcircuitry. Such pressure spike or severe pressure oscillations behaviorin previous semiconductor manufacturing operations has not beenconsequential, since this is a transient phenomenon that is quicklyreplaced by equilibrium flow (and thus the pressure spike isaccommodated in the gradual progression of the process system tosteady-state operating conditions), but recent trends in rapid beamtuning in ion implant applications have resulted in the processingsystems being sensitive to this threshold fluctuation.

The occurrence of extreme pressure oscillations can cause flow circuitrycomponents such as mass flow controllers to temporarily lose control,with the result that the process tool receiving the dispensed fluidreceives out-of-specification fluid flow. In some instances, this mayresult in automatic process monitoring systems functioning to terminateoperation, with consequent downtime adverse to the maintenance ofmanufacturing productivity. In other instances, the manufacturing toolmay process the sudden high, or in some cases very low, influx of fluid,with the result that out-of-specification product is produced.

Accordingly, the consequences of influent fluid pressure fluctuations,some of which may be caused by certain components in a pressureregulator apparatus in a fluid supply package, in the fluid flow frompressure-regulated vessels can be severely detrimental to processefficiency and productivity.

SUMMARY

The present disclosure relates to pressure management ofpressure-regulated fluid storage and dispensing vessels primarily for,but not necessarily limited to, the dispensation of fluids at low fluidflow rates that are susceptible to pressure-fluctuations upon initiationof a fluid dispensing operation.

In one example embodiment, there is provided a fluid supply packageincluding a pressure-regulated fluid storage and dispensing vessel and apressure regulator disposed in an interior volume of the dispensingvessel including a housing having a chamber with an inlet and an outlet,the chamber including therein a pressure-sensing assembly with astationary portion fixed relative to the housing and a movable portion,the stationary and movable portions being interconnected by a bellowsstructure with diaphragm elements adapted to expand and contract inresponse to pressure variations in the chamber. The pressure sensingassembly further includes a damper assembly adapted to dampenoscillations at high flow rates and stabilize movement of thepressure-sensing assembly between open and closed positions, the damperassembly disposed within a sleeve formed on the movable portion. Theregulator further includes a poppet closure assembly operatively coupledto the pressure-sensing assembly and configured to regulate fluidpressure between the inlet and outlet of the chamber, the poppet closureassembly including a poppet element and a seating structure located atthe inlet of the chamber, the poppet element having an upperhemispherical-shaped surface adapted to mate and contact the seatingstructure to form a seal. The fluid supply package further includes avalve head coupled to the dispensing vessel and adapted for dispensingof a fluid from the vessel through a discharge port, the pressureregulator being disposed upstream of the discharge port and coupled tothe valve head, the valve head including a flow control valve that isoperable to control fluid dispensing from the vessel.

In another example embodiment, there is provided a pressure regulatorincluding a pressure regulator disposed in an interior volume of thedispensing vessel, the pressure regulator including a housing having achamber with an inlet and an outlet. The chamber of the regulatorincludes therein a pressure-sensing assembly with a stationary portionfixed relative to the housing and a movable portion, the stationary andmovable portions being interconnected by a bellows structure withdiaphragm elements that expand and contract in response to pressurevariations in the chamber. The regulator also includes a damper assemblythat dampens oscillations and stabilizes movement of thepressure-sensing assembly between open and closed positions, the damperassembly disposed within a sleeve formed on the movable portion. Theregulator also includes a poppet closure assembly operatively coupled tothe pressure-sensing assembly that regulates fluid pressure between theinlet and outlet of the chamber, the poppet closure assembly including apoppet element and a seating structure located at the inlet of thechamber, the poppet element having an upper hemispherical-shaped surfaceadapted to mate and contact the seating structure to form a seal.

In yet another example embodiment, there is provided fluid supplypackage including a pressure-regulated fluid storage and dispensingvessel and a pressure regulator disposed in an interior volume of thedispensing vessel, the pressure regulator including a housing having achamber with an inlet and an outlet with the chamber including therein apressure-sensing assembly with a stationary portion fixed relative tothe housing and a movable portion, the stationary and movable portionsbeing interconnected by a bellows structure with single weld diaphragmelements adapted to expand and contract in response to pressurevariations in the chamber. The regulator further includes a damperassembly that dampens oscillations and stabilizes movement of thepressure-sensing assembly between open and closed positions, the damperassembly being disposed within a sleeve formed on the movable portion.The regulator also including a poppet closure assembly operativelycoupled to the pressure-sensing assembly that regulates fluid pressurebetween the inlet and outlet of the chamber, the poppet closure assemblyincluding a poppet element and a seating structure located at the inletof the chamber, the poppet element having an upper hemispherical-shapedsurface adapted to mate and contact the seating structure to form aseal. The fluid supply package also includes a valve head coupled to thedispensing vessel and adapted for dispensing of a fluid from the vesselthrough a discharge port, the pressure regulator being disposed upstreamof the discharge port and coupled to the valve head, the valve headincluding a flow control valve that is operable to control fluiddispensing from the vessel.

BRIEF DESCRIPTION OF THE DRAWINGS

The disclosure may be more completely understood in consideration of thefollowing description of various illustrative embodiments in connectionwith the accompanying drawings

FIGS. 1A-1E are cross-sectional elevation, top and enlarged views of apressure regulator apparatus for a pressure-regulated fluid storage anddispensing vessel according to the teachings of the invention.

FIGS. 2A-2C are cross-sectional elevation, top and enlarged views of animproved bellows structure of a pressure regulator apparatus for apressure-regulated fluid storage and dispensing vessel according to theteachings of the invention.

FIG. 3 is a schematic elevation view, in partial cross-section, of afluid supply package utilizing the pressure regulator devices of FIGS. 1and 2.

FIG. 4 is a cross-sectional view of a pressure regulator of the generaltype utilized in the vessels shown and described with respect to theFIG. 3.

FIG. 5 is a schematic representation of a series-arranged dual regulatorassembly, of a type as shown and described with reference to the fluidsupply package of FIG. 3.

While the disclosure is amenable to various modifications andalternative forms, specifics thereof have been shown by way of examplein the drawings and will be described in detail. It should beunderstood, however, that the intention is not to limit aspects of thedisclosure to the particular illustrative embodiments described. On thecontrary, the intention is to cover all modifications, equivalents, andalternatives falling within the spirit and scope of the disclosure.

DETAILED DESCRIPTION

The following detailed description should be read with reference to thedrawings in which similar elements in different drawings are numberedthe same. The detailed description and the drawings, which are notnecessarily to scale, depict illustrative embodiments and are notintended to limit the scope of the invention. The illustrativeembodiments depicted are intended only as exemplary. Selected featuresof any illustrative embodiment may be incorporated into an additionalembodiment unless clearly stated to the contrary.

The various embodiments of the present disclosure relate to pressuremanagement of pressure-regulated fluid storage and dispensing vesselsthat can be susceptible to substantial fluctuations in pressurebehavior, high or low, upon initiation of a fluid dispensing operation,and to pressure management arrangements, apparatus and methods forcombating continual periodic pressure oscillation behavior, such asfluid pressure excursions of a recurrent episodic character. The presentdisclosure contemplates various approaches to modifying the pressureregulator device housed in the fluid vessel so that dispensing operationcan be initiated more smoothly and without substantial pressure/flowrate fluctuation consequences. In such approaches, the pressureregulators are operated so that outlet pressure and flow from suchdevices are modulated to dampen and at least partially attenuate anysudden pressure fluctuation at startup.

As used herein, the term “pressure-regulated” in reference to fluidstorage and dispensing vessels means that such vessels have at least onepressure regulator device, set pressure valve, or vacuum/pressureactivated check valve disposed in an interior volume of the vesseland/or in a valve head of the vessel, with each such pressure regulatordevice being adapted so that it is responsive to fluid pressure in thefluid flow path immediately downstream of the pressure regulator device,and opens to enable fluid flow at a specific downstream reduced pressurecondition in relation to a higher fluid pressure upstream of thepressure regulator device, and subsequent to such opening operates tomaintain the pressure of fluid discharged from the pressure regulatordevice at a specific, or “set point,” pressure level.

These various approaches to reduce dramatic pressure oscillations incorresponding specific embodiments include the following operationaltechniques and arrangements: optimizing design of the pressure regulatorto minimize internal friction necessary to open the poppet element ofthe pressure regulator in the vessel; improvements to the poppet andpressure regulator sealing surface to prevent sticking of the poppetwhen it is first opened, in which the poppet still provides positiveclosure and stoppage of fluid flow in the closed position, but whereinfrictional force required to be overcome in displacing the poppet fromits seating structure is minimized, in which such improvements includeone or more of: (i) selection of alternative materials of construction,having a low level of deformation in use, (ii) modification of the shapeof the poppet from a conventional conical sealing shape to a sphericalsealing shape, (iii) use of a non-metallic material of construction forthe poppet seating structure, and (iv) use of a metal poppet element anda fluid compatible plastic material of construction for the poppetseating structure, altering geometry of a matably engageable poppetelement and seat structure of the pressure regulator, so that minimalcontact is made at an obtuse angle between such elements, in order tominimize potential sticking behavior, e.g., wherein the poppet elementhas a round, blunt sealing surface reposing on a flat cylindrical(donut-shaped or washer-shaped) seating structure; modification ofpoppet element and seating structure materials of construction tominimize sticking behavior or “stiction” upon closing and opening of thepressure regulator, e.g., use of a hard, stiff, fluid compatible polymermaterial for the seating structure and metal for the face of the poppetelement.

Another portion of the pressure regulator is modified to improve fluiddispensation by providing: modifications of the bellows andpressure-sensing assembly of the pressure regulator device, to includeone or more of: 1) modification of the bellows structure, such as byvariation of the number of diaphragm elements, material of construction,thickness, and elasticity of the bellows, so that the travel distance ofthe poppet element is reduced and these combination of elementsfacilitates in at least partially attenuating pressure fluctuations offluid dispensed from the vessel at inception of fluid dispensing. 2)modification of geometry of the regulator, including the chamber formedby a stationary portion, a movable portion and the bellows structure.

In the aforementioned fluid supply package, the pressure-regulatedvessel may comprise a series arrangement of pressure regulators in theinterior volume of the vessel, e.g., two or more regulators in series.The set point of the pressure regulators may have any suitable value,and in various embodiments the pressure regulator immediately upstreamof the discharge port may have a subatmospheric pressure set point.

Referring now to the drawings, more particularly referring to FIGS.1A-1E there is illustrated cross-sectional elevation, top and enlargedviews of a pressure regulator apparatus or assembly 100 for apressure-regulated fluid storage and dispensing vessel according to theteachings of the invention. Pressure regulator 100 includes a housing110 which is formed from cooperating portions 112 and 114 and thehousing portions are secured together in a hermetically sealed manner.For example, the housing portions may be welded together along matingedges and as represented by numeral 116. In the illustrated embodiment,housing 110 includes an inlet 120 that communicates with an upstreamfluid line (not shown) to supply pressurized fluid to housing 110. Anyconventional arrangement for interconnecting the inlet 120 or housing110 with the fluid line may be used, although the intended environmentfor the subject regulator is one that is exposed to low or highpressure, such as for the semiconductor industry where ultra cleanenvironments are required. Likewise, an outlet 122 is formed in thehousing second portion 114 and communicates with a downstream fluid line(not shown).

Housing 110 forms a chamber 124 having at least partially securedtherein a pressure-sensing assembly 130 that includes a stationaryportion 132 fixed to the housing and a movable portion 134 operativelyassociated with the stationary portion. In one example embodiment,circumferentially spaced legs 136 extend radially outward from theperiphery of the stationary portion and are received within a groove 140in housing 110 so that when the housing portions are welded togetheralong their mating edges, the stationary portion is also simultaneouslysecured in fixed relation by the weld.

Referring to FIG. 1A and to FIG. 1E, the stationary 132 and movableportions 134 of pressure-sensing assembly 130 are joined together by aflexible member, such as bellows 142. One form of bellows 142 includes aseries of annular members or diaphragms that are alternately secured atradially inner and outer regions (in double weld fashion) to define anaccordion-like arrangement. Opposite ends of bellows assembly 142 arethen secured to stationary 132 and movable portions 134 ofpressure-sensing assembly 130, respectively. Such a bellows arrangementhas a relatively small stack height in a fully collapsed condition (FIG.1E). In its fully collapsed condition, a poppet closure assembly 160,operatively coupled to movable portion 134 and adjacent to inlet 120, isclosed.

Referring now to FIGS. 1A and 1C, a poppet closure assembly 160 issecured to movable portion 134 of pressure-sensing assembly 130 to openor close inlet 120. More particularly, poppet closure assembly 160includes a stem 162 having an enlarged base 164 coupled to movableportion 134 on one end and coupled to a poppet 167 on the other end ofstem 162. Poppet 167 engages a poppet seat structure 170. The base 164is mounted adjacent the pressure-sensing assembly 130 while the stem 162extends axially toward the inlet 120. Stem 162 proceeds outwardly ofchamber 124 and into the inlet 120 of the regulator. A second or outerend 166 of the stem is threaded and receives an elastomeric member 168that defines poppet 167. Preferably, poppet 167 is self-tapping so thatduring assembly, it may be threaded onto the stem, and through apredetermined selected number of turns backed off of seat structure 170to define a precise opening. In a related embodiment, a ring isinterposed between an upper end of poppet 167 and seat structure 170 toassist in avoiding stiction problems during operation.

In this example embodiment, poppet 167 mounted on poppet stem 162 hasbeen modified to provide a semi-hemispherical shape at its proximal endnear stem 162 for matably sealingly engaging seat structure 170. In thisembodiment, seat structure 170 may be formed of any suitable material,and may for example comprise a hard, stiff, fluid compatible polymer,such as a polyacetal material or a fluoropolymer such as, for example,polychlorotetrafluoroethylene. Likewise, poppet 167 may be formed of anysuitable material compatible with the seat structure, and may forexample be formed of a metal, such as stainless steel, titanium, nickel,or other metal or material of construction that is compatible with theother components of poppet assembly 160 of regulator 100, as well as thefluids to be flowed through such regulator in use.

Referring briefly to FIGS. 1A and 1D, stationary portion 132 and movableportion 134 coupled to bellows assembly 142 cooperate with one anotherto control axial movement of movable portion 134 toward and away frominlet 120 in response to varying pressure in chamber 124. A dampeningassembly 150 is included in pressure-sensing assembly 130 for dampeningpressure fluctuations due to sudden increases in fluid pressure as thefluid within a fluid vessel is dispensed. Dampening assembly 150 isparticularly suited for high flow conditions. Dampening assembly 150, asshown in FIG. 1D, is comprised of an axial member 144, extends fromstationary portion 132 toward inlet 120 and is fixedly secured tostationary portion 132, a spring member 146 and an upper circumferentialsleeve 148. Axial member 144 includes a body member 145 having aproximal end coupled to stationary portion 132 and a distal endprotruding towards movable portion 134. In this example embodiment,axial member body 145 has spring member 146 disposed circumferentiallyabout the distal end of the axial member 144 with circumferential sleeve148 located about the proximal end of axial member 144 and in contactwith an upper end of spring member 146. Surrounding axial member 144 isa sleeve portion 135 extending from a central region of movable portion134 toward outlet 122. In this example embodiment, circumferentialsleeve 148 is solid in construction and has an inner surface directlycontacting an outer surface of axial body 145, but it is not necessarilylimited to a solid construction.

As described above, undesirable oscillations of the pressure-sensingassembly 130 are often associated with high flow rates or unpredictablelow flow rates. To overcome problems associated with the pressureoscillations, dampening assembly 150 is provided. In prior artarrangements, dampening assembly 150 would include an elastomeric orresilient member, such as an O-ring, interposed between the axial member144 and sleeve portion 135. However, it has been discovered that in lowflow rate and low pressure applications, the O-ring actually hindersopening and closing of poppet closure assembly 160 and movement ofpoppet 167. Therefore, it is preferable to eliminate the elastomericO-ring normally located within a circumferential sleeve 148 at the topof spring member 146. In another embodiment, a solid circumferentialring 148 is used to facilitate movement of axial member 144 withouthaving the stiction challenges.

In operation, an interior cavity 131 of pressure-sensing assembly 130has a predetermined pressure charge. The movable portion 134 movesaxially in response to the pressure differential between cavity 131 andthe fluid pressure in chamber 124. The flexible bellows 142 allows thisrelative movement and, as will be understood, poppet member or element167 varies its relationship with seat structure 170 to regulate fluidflow between inlet 120 and outlet 121. The expansion and contraction ofthe member 130 in response to the pressure in chamber 124 is thusdampened by the slight frictional drag imposed by circumferential ring148. This permits the regulator to compensate for oscillationsassociated with an occasional spike or increase in a fluid flow rates.Accordingly, at very low flow rates associated with positions of thepoppet 167 adjacent the shut-off or closed position, movable portion 134of the pressure-sensing assembly can move more freely.

Referring now to FIGS. 2A-2C, there is illustrated cross-sectionalelevation, top and enlarged views of an improved bellows structure 242of a pressure regulator apparatus 200 for a pressure-regulated fluidstorage and dispensing vessel according to the teachings of theinvention. In this example embodiment, regulator 200 includes a housing210 that includes a pressure sensing assembly 230 comprised of astationary portion 232, a movable portion 234 interconnected by abellows structure 242 having various diaphragm elements. Prior artbellows with diaphragm elements have utilized double weld construction,which have led to expansion and contraction problems due to a loss offlexibility (shown more closely in FIG. 1E). In this example embodiment,the diaphragm elements of bellows 242 are formed of single weldconstruction thereby allowing more flexibility in the expansion andcontraction of bellows 242, as seen more clearly in FIG. 2C. Bellows 242in this example embodiment is illustrated in the closed or collapsedposition.

Referring now to FIG. 3, there is illustrate an elevation view, inpartial cross-section, of a standard fluid supply package 200 whichincludes a fluid storage and dispensing vessel 212 comprising acylindrical sidewall 214 and a floor 216 enclosing an interior volume218 of the vessel. The side wall and floor may be formed of any suitablematerial of construction, e.g., metal, gas-impermeable plastic,fiber-resin composite material, etc., as appropriate to the gas to becontained in the vessel, the end use environment of the apparatus, andthe pressure levels to be maintained in the vessel in storage anddispensing use. In this example embodiment, a collar flange member 280is coupled to the neck of the vessel 212 and a valve head body 226 issecured to the collar flange member 280. This type of fluid storage anddispensing system is described in U.S. Pat. Nos. 5,937,895, 6,007,609,6,045,115, and 7,905,247, albeit with the first three of such patentsreferencing a single port valve cylinder head, however the disclosure ofall of such patents are incorporated herein by reference in theirrespective entireties.

The valve head body 226 is formed with a central vertical passagetherein for dispensing of gas deriving from fluid in the vessel 212. Thevalve head body contains a flow control valve that is coupled with thevalve actuator 238 (hand wheel or pneumatic actuator), for selectivemanual or automated opening or closing of the valve. The valve actuatorthus can be any of various suitable types, e.g., manual actuators,pneumatic actuators, electromechanical actuators, etc., or any othersuitable devices for opening and closing the valve in the valve head. Avalve element, such as a flow control valve, is disposed downstream ofone or more regulators, so that fluid dispensed from the vessel flowsthrough the regulator prior to flow through the flow control valve. Thevalve head body 226 typically includes a fill passage formed therein tocommunicate at its upper end with a fill port. The fill passage at itslower end exits the valve head body 226 at a bottom surface thereof asshown. When the fill port is coupled with a source of the gas to becontained in the vessel, the fluid can flow through the fill passage andinto the interior volume 218 of the vessel 212.

Joined to the lower end of valve head body 226 is an extension tube 240,containing an upper particle filter 239 therein. Upper regulator 242 ismounted on the end of the extension tube 240. The upper regulator 242 issecured to the extension tube lower end in any suitable manner, as forexample by providing internal threading in the lower end portion of theextension tube, with which the regulator 242 is threadably enagageable.Alternatively, the upper regulator may be joined to the lower end of theextension tube by compression fittings or other leak-tight vacuum andpressure fittings, or by being bonded thereto, e.g., by welding,brazing, soldering, melt-bonding, or by suitable mechanical joiningmeans and/or methods, etc. Regulators 100 and 200 described in FIGS. 1and 2 are used in this fluid supply vessel configuration to assist indispensing of fluid to the external processing systems.

The upper regulator 242 is arranged in series relationship with a lowerregulator 260, as shown. For such purpose, the upper and lowerregulators may be threadably engageable with one another, bycomplementary threading comprising threading on the lower extensionportion of the upper regulator 242, and threading that is matablyengageable therewith on the upper extension portion of the lowerregulator 260. Alternatively, the upper and lower regulators may bejoined to one another in any suitable manner, as for example by couplingor fitting means, by adhesive bonding, welding, brazing, soldering,etc., or the upper and lower regulators may be integrally constructed ascomponents of a dual regulator assembly. At its lower end, the lowerregulator 260 is joined to high efficiency particle filter 246. The highefficiency particle filter 246 serves to prevent contamination of theregulator elements and the flow control valve with particulates or othercontaminating species that otherwise may be present in the fluid flowedthrough the regulators and valves in the operation of the apparatus.

The fluid dispensed in such manner will be at a pressure determined bythe set point of the regulator 242. The respective set points of theregulator 260 and the regulator 242 in the FIG. 3 embodiment may beselected or preset at any suitable values to accommodate a specificdesired end use application. For example, the lower (upstream) regulator260 may have a set point that is in a range of from about 20 psig toabout 2500 psig. The upper (downstream) regulator 242 may have a setpoint that is above or below, preferably below, the pressure set pointof the lower (upstream) regulator 260, e.g., in a range of from about 1torr up to 2500 psig. In one illustrative embodiment, the lower(upstream) regulator 260 has a set point pressure value that is in therange of from about 100 psig to about 1500 psig, while the upper(downstream) regulator 242 has a set point pressure value in the rangeof from about 100 torr to about 50 psig, wherein the lower (upstream)pressure set point is above the set point of the upper (downstream)regulator.

Although the set points of the regulators in a serial regulator assemblymay be established in any suitable ratio in relation to one another, ina two-regulator assembly such as shown in FIGS. 3 and 5, the upstreamregulator in preferred practice advantageously has a pressure set pointthat is at least twice the set point value (measured in the samepressure units of measurement) of the downstream regulator.

In one illustrative embodiment of a fluid storage and dispensing systemof the type shown in FIG. 3, the vessel 212 can be a 3AA 2015 DOT 2.2liter cylinder. The vessel can include a high efficiency particle filter246. In some embodiments, the regulators are HF series Swagelok®.pressure regulators, with the upper (downstream) regulator 242 having aset point pressure in the range of from 100 torr to 100 psig, and thelower (upstream) regulator 260 having a set point pressure in the rangeof from 100 psig to 1500 psig, and with the set point pressure of thelower (upstream) regulator 260 being at least twice the set pointpressure of the upper (downstream) regulator 242. In a specificembodiment, the upper (downstream) regulator 242 may have an inletpressure of 100 psig and outlet pressure of 500 torr, and the lower(upstream) regulator 260 may have an inlet pressure of 1500 psig andoutlet pressure of 100 psig.

A fluid supply package 200 with the regulator improvements illustratedin FIGS. 1 and 2 can be utilized for sub-atmospheric pressure dopant gasdelivery for ion implantation. Regardless of cylinder temperature,elevation or fill volume, the system delivers product only when a vacuumlevel below 500 torr, is applied to the use port. Product cannot flowfrom the fluid supply package without such vacuum. Fluid stored in anddispensed from the fluid supply package of the disclosure may be of anysuitable type, and may for example comprise a fluid having utility insemiconductor manufacturing, manufacture of flat-panel displays, ormanufacture of solar panels.

The fluid contained in the fluid storage and dispensing vessel may forexample comprise a hydride fluid for semiconductor manufacturingoperations. Examples of hydride fluids of such type include arsine,phosphine, stibine, silane, chlorosilane, diborane, germane, disilane,trisilane, methane, hydrogen selenide, hydrogen sulfide, and hydrogen.Other fluids useful in semiconductor manufacturing operations may beemployed, including acid fluids such as hydrogen fluoride, borontrichloride (BCl3), boron trifluoride (BF3), diboron tetrafluoride(B2F4), hydrogen chloride (HCl), halogenated silanes such as, forexample silicon tetrafluoride, halogenated disilanes, germaniumtetrafluoride, phosphorous trifluoride, phosphorous pentafluoride,arsenic trifluoride, arsenic pentafluoride, nitrogen, oxygen, fluoride,xenon, argon, krypon, carbon monoxide, carbon dioxide, carbontetrafluoride, trifluoromethane, difluoromethane, fluoromethane,nitrogen trifluoride, carbonyl fluoride, as well as mixtures of two ormore of the foregoing, etc., having utility in semiconductormanufacturing operations as halide etchants, cleaning agents, sourcereagents, dopant gases, etc. Other reagents which may be thus stored anddelivered include gaseous organometallic reagents used as precursors formetalorganic chemical vapor deposition (MOCVD) and atomic layerdeposition (ALD).

FIG. 4 is a cross-sectional view of a pressure regulator of the generaltype utilized in the vessels shown and described with respect to theFIG. 3 and can be substituted with the embodiments described in FIGS. 1and 2. Prior art pressure regulator currently in use are described inU.S. Pat. No. 5,303,734, the disclosure of which is hereby incorporatedherein by reference in its entirety. As illustrated, the pressureregulator includes a main central housing communicating with inlet andoutlet passages. A poppet is reposed in the inlet passage, and is shownin closed position, as engaged with the seat of the inlet passage, toclose such passage to fluid flow. The poppet is coupled with a stem thatin turn is connected to the pressure sensing assembly in the interiorvolume of the pressure regulator. The pressure sensing assembly includesmultiple diaphragms defining a bellows structure, in which the pressuresensing assembly is responsive to pressure level in the outlet passageof the regulator, such that pressure in the outlet passage that is belowa predetermined setpoint pressure will cause movement of the multiplediaphragms and corresponding translation of the pressure sensingassembly and the poppet stem coupled thereto with, so that the poppet isdisengaged from its seat, to allow fluid flow through the inlet passageand central chamber of the regulator to the outlet passage, for flow offluid from the discharge opening of the outlet passage. When fluidpressure in the outlet passage is above the set point pressure of theregulator, the pressure sensing assembly will responsively translate thepoppet stem and associated poppet, so that the poppet engages the seatof the inlet passage, to close the passage to fluid flow therethrough.

FIG. 5 illustrates a series-arranged dual regulator assembly, of a typeas shown and described with reference to the fluid supply package ofFIG. 3 and can be substituted with the embodiments described in FIGS. 1and 2 to improve performance, especially in low flow rate applications.In this series-arranged regulator assembly, a first pressure regulatorSPR-1 is in series with a second pressure regulator SPR-2. Therespective regulators are coupled with one another by an intermediatepressure connection passage. Regulator SPR-1 has a higher pressure setpoint in relation to the pressure set point of regulator SPR-2.Regulator SPR-1 is disposed with its high pressure inlet (High P Inlet)exposed to high pressure fluid when the regulator assembly is installedin a fluid storage and dispensing vessel as shown in FIGS. 1 and 3.Regulator SPR-2 is disposed in series with regulator SPR-1, and may forexample have a set point pressure that is a subatmospheric pressure, sothat the downstream regulator (SPR-2) will not dispense fluid unless itsoutlet is below the subatmospheric set point pressure of such regulatorSPR-2.

Accordingly, when regulator SPR-2 opens in response to outlet pressurebelow the set point subatmospheric pressure, there is a correspondingreduction in pressure in the intermediate pressure connection passagebetween the two regulators, and when such intermediate pressure has beenreduced below the set point pressure of regulator SPR-1, then regulatorSPR-1 will open, and fluid will flow from the high-pressure inlet ofregulator SPR-1 through such regulator, through the intermediatepressure connection passage and through the regulator SPR-2 to thesubatmospheric pressure outlet. By such arrangement, a high-pressurefluid is contained in a safe and effective manner in the fluid storageand dispensing vessel, and pressure of such fluid in dispensing isreduced by the upstream pressure regulator to an intermediate pressure,and by the downstream pressure regulator from such intermediate pressureto the lower discharge pressure determined by the set point of thedownstream pressure regulator.

ASPECTS

Aspect 1. A fluid supply package comprising a pressure-regulated fluidstorage and dispensing vessel; a pressure regulator disposed in aninterior volume of the dispensing vessel including a housing having achamber with an inlet and an outlet, the chamber including therein apressure-sensing assembly with a stationary portion fixed relative tothe housing and a movable portion, the stationary and movable portionsbeing interconnected by a bellows structure with diaphragm elementsadapted to expand and contract in response to pressure variations in thechamber; a damper assembly adapted to dampen oscillations and stabilizemovement of the pressure-sensing assembly between open and closedpositions, the damper assembly disposed within a sleeve formed on themovable portion; a poppet closure assembly operatively coupled to thepressure-sensing assembly and adapted to regulate fluid pressure betweenthe inlet and outlet of the chamber, the poppet closure assemblyincluding a poppet element and a seating structure located at the inletof the chamber, the poppet element having an upper hemispherical-shapedsurface adapted to mate and contact the seating structure to form aseal; and a valve head coupled to the dispensing vessel and adapted fordispensing of a fluid from the vessel through a discharge port, thepressure regulator being disposed upstream of the discharge port andcoupled to the valve head, the valve head including a flow control valvethat is operable to control fluid dispensing from the vessel.

Aspect 2. The fluid supply package of aspect 1, wherein the poppetclosure assembly further includes an O-ring member interposed betweenthe upper poppet element surface and the seating structure.

Aspect 3. The fluid supply package of aspect 1, wherein the diaphragm ofthe bellows structure is configured to have single weld diaphragmelements.

Aspect 4. The fluid supply package of aspects 1-3, wherein the poppetclosure assembly is further comprised of a material of constructionhaving a low level of deformation while under pressure.

Aspect 5. The fluid supply package of aspects 1-4, wherein the poppetclosure assembly is further comprised of a poppet element of anon-conical sealing shape with a complimentary-shaped seating structure.

Aspect 6. The fluid supply package of aspects 1-5, wherein the poppetseating structure of the poppet closure assembly is comprised of anon-metallic material.

Aspect 7. The fluid supply package of aspects 1-3, wherein the bellowsstructure with diaphragm elements is comprised of a material having athickness and an elasticity configured to reduce a travel distance ofthe poppet element within the poppet closure assembly thereby partiallyattenuating a fluid dispensed from the vessel at inception of fluiddispensing.

Aspect 8. The fluid supply package of aspect 1, wherein the damperassembly includes an axial member with a body, a circumferential sleeveand a spring member, the axial body member having a proximal end coupledto the stationary portion and a distal end protruding towards themovable portion, the axial member body having the spring member disposedcircumferentially about the distal end of the axial member with thecircumferential sleeve located about the proximal end of the axialmember and in contact with an upper end of the spring member.

Aspect 9. The fluid supply package of aspect 1, wherein thecircumferential sleeve is solid in construction and has an inner surfacedirectly contacting an outer surface of the axial body.

Aspect 10. The fluid supply package of aspect 7, wherein said fluidcomprises a fluid for semiconductor manufacturing, manufacturing offlat-panel displays, or manufacture of solar panels.

Aspect 11. A pressure regulator assembly comprising: a pressureregulator disposed in an interior volume of the dispensing vesselincluding a housing having a chamber with an inlet and an outlet, thechamber including therein a pressure-sensing assembly with a stationaryportion fixed relative to the housing and a movable portion, thestationary and movable portions being interconnected by a bellowsstructure with diaphragm elements adapted to expand and contract inresponse to pressure variations in the chamber; a damper assemblyadapted to dampen oscillations and stabilize movement of thepressure-sensing assembly between open and closed positions, the damperassembly disposed within a sleeve formed on the movable portion; and apoppet closure assembly operatively coupled to the pressure-sensingassembly and adapted to regulate fluid pressure between the inlet andoutlet of the chamber, the poppet closure assembly including a poppetelement and a seating structure located at the inlet of the chamber, thepoppet element having an upper hemispherical-shaped surface adapted tomate and contact the seating structure to form a seal.

Aspect 12. The pressure regulator assembly of aspect 11, wherein thepoppet closure assembly further includes an O-ring member interposedbetween the upper poppet element surface and the seating structure.

Aspect 13. The pressure regulator assembly of aspect 11, wherein thediaphragm of the bellows structure is configured to have single welddiaphragm elements.

Aspect 14. The pressure regulator of aspects 11-13, wherein the poppetclosure assembly is further comprised of a material of constructionhaving a low level of deformation while under pressure.

Aspect 15. The pressure regulator assembly of aspects 11-14, wherein thepoppet closure assembly is further comprised of a poppet element of anon-conical sealing shape with a complimentary-shaped seating structure.

Aspect 16. The pressure regulator assembly of aspects 11-15, wherein thepoppet seating structure of the poppet closure assembly is comprised ofa non-metallic material.

Aspect 17. The pressure regulator assembly of aspects 11-13, wherein thebellows structure with diaphragm elements is comprised of a materialhaving a thickness and an elasticity configured to reduce a traveldistance of the poppet element within the poppet closure assemblythereby partially attenuating a fluid dispensed from the vessel atinception of fluid dispensing.

Aspect 18. The pressure regulator assembly of aspects 11-13, wherein thedamper assembly includes an axial member with a body, a circumferentialsleeve and a spring member, the axial body member having a proximal endcoupled to the stationary portion and a distal end protruding towardsthe movable portion, the axial member body having the spring memberdisposed circumferentially about the distal end of the axial member withthe circumferential sleeve located about the proximal end of the axialmember and in contact with an upper end of the spring member.

Aspect 19. A fluid supply package comprising: a pressure-regulated fluidstorage and dispensing vessel; a pressure regulator disposed in aninterior volume of the dispensing vessel including a housing having achamber with an inlet and an outlet, the chamber including therein apressure-sensing assembly with a stationary portion fixed relative tothe housing and a movable portion, the stationary and movable portionsbeing interconnected by a bellows structure with single weld diaphragmelements adapted to expand and contract in response to pressurevariations in the chamber; a damper assembly adapted to dampenoscillations and stabilize movement of the pressure-sensing assemblybetween open and closed positions, the damper assembly disposed within asleeve formed on the movable portion; a poppet closure assemblyoperatively coupled to the pressure-sensing assembly and adapted toregulate fluid pressure between the inlet and outlet of the chamber, thepoppet closure assembly including a poppet element and a seatingstructure located at the inlet of the chamber, the poppet element havingan upper hemispherical-shaped surface adapted to mate and contact theseating structure to form a seal; and a valve head coupled to thedispensing vessel and adapted for dispensing of a fluid from the vesselthrough a discharge port, the pressure regulator being disposed upstreamof the discharge port and coupled to the valve head, the valve headincluding a flow control valve that is operable to control fluiddispensing from the vessel.

Aspect 20. The fluid supply package of aspect 19, wherein the damperassembly includes an axial member with a body, a circumferential sleeveand a spring member, the axial body member having a proximal end coupledto the stationary portion and a distal end protruding towards themovable portion, the axial member body having the spring member disposedcircumferentially about the distal end of the axial member with thecircumferential sleeve located about the proximal end of the axialmember and in contact with an upper end of the spring member.

Having thus described several illustrative embodiments of the presentdisclosure, those of skill in the art will readily appreciate that yetother embodiments may be made and used within the scope of the claimshereto attached. Numerous advantages of the disclosure covered by thisdocument have been set forth in the foregoing description. It will beunderstood, however, that this disclosure is, in many respect, onlyillustrative. Changes may be made in details, particularly in matters ofshape, size, and arrangement of parts without exceeding the scope of thedisclosure. The disclosure's scope is, of course, defined in thelanguage in which the appended claims are expressed.

What is claimed is:
 1. A fluid supply package comprising: apressure-regulated fluid storage and dispensing vessel; a pressureregulator disposed in an interior volume of the dispensing vesselincluding a housing having a chamber with an inlet and an outlet, thechamber including therein a pressure-sensing assembly with a stationaryportion fixed relative to the housing and a movable portion, thestationary and movable portions being interconnected by a bellowsstructure with diaphragm elements adapted to expand and contract inresponse to pressure variations in the chamber; a damper assemblyadapted to dampen oscillations and stabilize movement of thepressure-sensing assembly between open and closed positions, the damperassembly disposed within a sleeve formed on the movable portion; apoppet closure assembly operatively coupled to the pressure-sensingassembly and adapted to regulate fluid pressure between the inlet andoutlet of the chamber, the poppet closure assembly including a poppetelement and a seating structure located at the inlet of the chamber, thepoppet element having an upper hemispherical-shaped surface adapted tomate and contact the seating structure to form a seal; and a valve headcoupled to the dispensing vessel and adapted for dispensing of a fluidfrom the vessel through a discharge port, the pressure regulator beingdisposed upstream of the discharge port and coupled to the valve head,the valve head including a flow control valve that is operable tocontrol fluid dispensing from the vessel.
 2. The fluid supply package ofclaim 1, wherein the poppet closure assembly further includes an O-ringmember interposed between the upper poppet element surface and theseating structure.
 3. The fluid supply package of claim 1, wherein thediaphragm of the bellows structure is configured to have single welddiaphragm elements.
 4. The fluid supply package of claim 1, wherein thepoppet closure assembly is further comprised of a material ofconstruction having a low level of deformation while under pressure. 5.The fluid supply package of claim 1, wherein the poppet closure assemblyis further comprised of a poppet element of a non-conical sealing shapewith a complimentary-shaped seating structure.
 6. The fluid supplypackage of claim 1, wherein the poppet seating structure of the poppetclosure assembly is comprised of a non-metallic material.
 7. The fluidsupply package of claim 1, wherein the bellows structure with diaphragmelements is comprised of a material having a thickness and an elasticityconfigured to reduce a travel distance of the poppet element within thepoppet closure assembly thereby partially attenuating a fluid dispensedfrom the vessel at inception of fluid dispensing.
 8. The fluid supplypackage of claim 1, wherein the damper assembly includes an axial memberwith a body, a circumferential sleeve and a spring member, the axialbody member having a proximal end coupled to the stationary portion anda distal end protruding towards the movable portion, the axial memberbody having the spring member disposed circumferentially about thedistal end of the axial member with the circumferential sleeve locatedabout the proximal end of the axial member and in contact with an upperend of the spring member.
 9. The fluid supply package of claim 1,wherein the circumferential sleeve is solid in construction and has aninner surface directly contacting an outer surface of the axial body.10. The fluid supply package of claim 7, wherein said fluid comprises afluid for semiconductor manufacturing, manufacturing of flat-paneldisplays, or manufacture of solar panels.
 11. A pressure regulatorassembly comprising: a pressure regulator disposed in an interior volumeof the dispensing vessel including a housing having a chamber with aninlet and an outlet, the chamber including therein a pressure-sensingassembly with a stationary portion fixed relative to the housing and amovable portion, the stationary and movable portions beinginterconnected by a bellows structure with diaphragm elements adapted toexpand and contract in response to pressure variations in the chamber; adamper assembly adapted to dampen oscillations and stabilize movement ofthe pressure-sensing assembly between open and closed positions, thedamper assembly disposed within a sleeve formed on the movable portion;and a poppet closure assembly operatively coupled to thepressure-sensing assembly and adapted to regulate fluid pressure betweenthe inlet and outlet of the chamber, the poppet closure assemblyincluding a poppet element and a seating structure located at the inletof the chamber, the poppet element having an upper hemispherical-shapedsurface adapted to mate and contact the seating structure to form aseal.
 12. The pressure regulator assembly of claim 11, wherein thepoppet closure assembly further includes an O-ring member interposedbetween the upper poppet element surface and the seating structure. 13.The pressure regulator assembly of claim 11, wherein the diaphragm ofthe bellows structure is configured to have single weld diaphragmelements.
 14. The pressure regulator assembly of claim 11, wherein thepoppet closure assembly is further comprised of a material ofconstruction having a low level of deformation while under pressure. 15.The pressure regulator assembly of claim 11, wherein the poppet closureassembly is further comprised of a poppet element of a non-conicalsealing shape with a complimentary-shaped seating structure.
 16. Thepressure regulator assembly of claim 11, wherein the poppet seatingstructure of the poppet closure assembly is comprised of a non-metallicmaterial.
 17. The pressure regulator assembly of claim 11, wherein thebellows structure with diaphragm elements is comprised of a materialhaving a thickness and an elasticity configured to reduce a traveldistance of the poppet element within the poppet closure assemblythereby partially attenuating a fluid dispensed from the vessel atinception of fluid dispensing.
 18. The pressure regulator assembly ofclaim 11, wherein the damper assembly includes an axial member with abody, a circumferential sleeve and a spring member, the axial bodymember having a proximal end coupled to the stationary portion and adistal end protruding towards the movable portion, the axial member bodyhaving the spring member disposed circumferentially about the distal endof the axial member with the circumferential sleeve located about theproximal end of the axial member and in contact with an upper end of thespring member.
 19. A fluid supply package comprising: apressure-regulated fluid storage and dispensing vessel; a pressureregulator disposed in an interior volume of the dispensing vesselincluding a housing having a chamber with an inlet and an outlet, thechamber including therein a pressure-sensing assembly with a stationaryportion fixed relative to the housing and a movable portion, thestationary and movable portions being interconnected by a bellowsstructure with single weld diaphragm elements adapted to expand andcontract in response to pressure variations in the chamber; a damperassembly adapted to dampen oscillations and stabilize movement of thepressure-sensing assembly between open and closed positions, the damperassembly disposed within a sleeve formed on the movable portion; apoppet closure assembly operatively coupled to the pressure-sensingassembly and adapted to regulate fluid pressure between the inlet andoutlet of the chamber, the poppet closure assembly including a poppetelement and a seating structure located at the inlet of the chamber, thepoppet element having an upper hemispherical-shaped surface adapted tomate and contact the seating structure to form a seal; and a valve headcoupled to the dispensing vessel and adapted for dispensing of a fluidfrom the vessel through a discharge port, the pressure regulator beingdisposed upstream of the discharge port and coupled to the valve head,the valve head including a flow control valve that is operable tocontrol fluid dispensing from the vessel.
 20. The fluid supply packageof claim 19, wherein the damper assembly includes an axial member with abody, a circumferential sleeve and a spring member, the axial bodymember having a proximal end coupled to the stationary portion and adistal end protruding towards the movable portion, the axial member bodyhaving the spring member disposed circumferentially about the distal endof the axial member with the circumferential sleeve located about theproximal end of the axial member and in contact with an upper end of thespring member.